Klaus Hummler

Klaus Hummler, Ph.D., is a highly experienced engineer specializing in product systems engineering and process technology development within the semiconductor industry. Currently serving as a Senior Principal Product Systems Engineer at ASML since 2020, Klaus previously held roles at ASML and SEMATECH, focusing on EUV source performance and 3D integration technologies, respectively. Earlier experience includes significant positions at companies such as siXis, Qimonda, Infineon Technologies, and Siemens Microelectronics, where Klaus contributed to advancements in memory subsystems, process development, and physical failure analysis across various technology generations. Klaus holds a Ph.D. and an MS in Physics from the University of Stuttgart.