Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless aligners and nanofabrication tools. 

Industry stakeholders as well as working groups of the most renowned universities and research institutes all over the world use Heidelberg Instruments systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more. 

With over 35 years of experience and well over 1,400 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment.

The Heidelberg Instruments systems and technology pool comprises high-precision maskless aligner (MLA) and laser lithography systems for direct writing of 2D, 2.5D and 3D microstructures to mask-making, and systems based on thermal scanning probe lithography (t-SPL) for the advanced nanopatterning. 3D laser lithography systems based on Two-Photon Polymerization (TPP) technology close the gap between conventional laser lithography - the basis of our strong core business - and the thermal scanning probe lithography (t-SPL) for nanopatterning.

Heidelberg Instruments is part of Lab14, a group of successful high-tech companies providing advanced manufacturing solutions with complementary products and services for a wide range of applications that require demanding solutions for nano- and microfabrication and surface analysis.

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Nanotechnology

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Semiconductor

Heidelberg Instruments

Heidelberg Instruments' headquarters in Heidelberg, Germany

Peter Heyl

Mitsunori Saito

Dr. Sven Preuss

Benedikt Stender

Alexander Forozan

Steffen Diez

Lars Hanke

System Engineering Team

Engineering Team

Sales and Business Development

Head of Departments

Leadership Team

Heidelberg Instruments

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System Engineering Team

Engineering Team

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Head of Departments

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